Mass-flow sensors boost performance, reliability with MEMS thermopiles
To bring higher reliability to dry-gas measurements, PMFc3000 series mass-flow sensors aim to eliminate field failures associated with contamination and pressure shock, which can affect other mass-flow sensors. Pin compatible with the Honeywell AWM3000 series, the MEMS-based sensors are said to provide two to four times better accuracy, being temperature compensated to
Further, the MEMS sensors’ output tolerance is less than 2% full scale (compared to greater than 5% for the AWM3000), allowing individual devices to be more easily interchanged. Standard units in the series cover the range from 30 to 1,000 standard cubic centimeters/minute (scc/min) and custom units can be configured with any full-scale range between 10 and 2,000 scc/min.
The devices’ MEMS die use a pair of compound thermopiles surrounding a central heating element to detect changes in temperature gradient caused by mass flow. An off-the-shelf state-of-the-art microcontroller provides internal signal conditioning. ($49.95 ea / 1,000 — samples available now.)
By Richard Comerford
Posifa Microsystems , San Jose , CA , United States
Bob Frostholm 650-222-6937
Advertisement
Learn more about Posifa Microsystems
