Capacitance-Voltage (C-V) Measurement Tips, Tricks, and Traps

Capacitance-Voltage (C-V) Measurement Tips, Tricks, and Traps

C-V testing has long been used to determine a variety of semiconductor parameters on many different devices and structures, ranging from MOSCAPs, MOSFETs, bipolar junction transistors, and JFETs to III-V compound devices, photovoltaic (solar) cells, MEMS devices, organic thin film transistor (TFT) displays, photodiodes, and carbon nanotubes. This white paper offers an overview on how to select the most appropriate type of C-V measurement instrumentation for a particular application, as well as some of the C-V tests typically performed and their parameter extraction limits. It also includes techniques for connecting to a probe station and how to correct to the probe tips. ■