Omron’s MEMS flow sensors- D6F Series

Omron's collection of MEMS Flow Sensors (D6F Series) feature highly accurate flow measurement. The sensors can accurately detect minute airflow, such as a single flap of a butterfly’s wings. These D6F gas flow sensors are capable of “measuring mass flow” independent of temperature and pressure.  

Key features of the D6F series include: 

1. High accuracy: ±3RD (25-100%F.S.) is realized by linear temperature correction using ASIC technology, ambient temperature = 25degC (Model: D6F-20A7D-000-0)
2. High sensitivity: Omron’s unique MEMS technology allows detection of very low air velocities
3. Compact: The product size is reduced by using the compact, world-smallest class size MEMS sensor element (Dimension of D6F-V model: 24x8x14mm.) 

Application examples include: clogging detection, combustion control, flow measurement, and air volume measurement.  

Visit our D6F Series brochure to learn more!