ICInsider Surveyor design tool can put a virtual scanning electron microscope (SEM) on designers’ desktops, giving them the ability to measure, label, and study the layers of a fully imaged device at high magnification. Designers can examine every single nanometer across all interconnect layers of the device, or the structural details of an innovative new MEMS chip.
The tool is available with seven reports on MEMS devices including Analog Devices ADXL330 (3-axis accelerometer), Bosch SMB380 (3-axis accelerometer), Bosch SMG070 (gyroscope), Freescale MMA7260Q (3-axis accelerometer), Kionix KXM52 (3-axis accelerometer), SiTime SiT8002 (oscillator), and STMicroelectronics LIS302DL (3-axis accelerometer). (Contact company for pricing and availability.)
Chipworks
Ottawa, Ontario , Canada
http://www.chipworks.com/icinsidesurveyor.aspx
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