MEMS gas mass flow sensors use cyclonic effect to keep clean — Omron Electronic Components
In differential pressure-sensing applications for gasses, using a mass flow sensor often improves low-flow resolution, resulting in a much finer level of control. The problem is, in dusty environments, the sensor or a prefilter often has to be removed for cleaning/replacement, halting operations. But thanks to a unique flow chamber design, D6F-P series MEMS gas mass flow sensors overcome the dust problem.
Each of the series’ sensors use a patented dust-segregation system that eliminates the need for an in-line filter in many applications, thus removing cost, reducing pressure drop, and saving space. The sensor’s internal flow path incorporates a nearly symmetrical centrifugal design, in which dust particles follow the outer pathway while the “clean” air flows up thru the center and over the MEMS sensing element. The D6F-P can be used in-line for applications up to 1 LPM or, in a bypass type of set-up, for flow rates over 200 LPM, and, because of the flow path’s symmetry, the cyclonic dust segregation mechanism is effective for both unidirectional and bidirectional flow applications.
Omron Electronic Components
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