The DLS200X2224 IR/thermal emitters are diamond-like sources (DLS) that are MEMS (micro-electro-mechanical systems) structures that are micromechanically-structured hot plates. The device is a carbon-based nanocomposite (amorphous diamond) that is deposited as a resistance material on a silicon membrane. The material has a temperature coefficient of resistance of 40 A/W typical and a material emissivity of 0.80.
The thermal time constant rise time of 28 ms and fall time of 6.8 ms enable modulation depths of approximately 25% and 10% at modulation frequencies of 100 Hz and 1,000 Hz, respectively. The life expectancy at 750°C (10 Hz, duty cycle, 50%) is 30,000 h and at 600°C it is 250,000 h. The active material of the thermal emitter is a nano-amorphous carbon (NAC) has two structural networks; a hydrogen-containing carbon and a network that consists of silicon oxides.
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