PI-USA offers PiezoWalk motor-based N-565 precise compact linear positioner

Designed for high-end applications in bio-nanotechnology, fiber-optics, microscopy, semiconductor testing, and metrology, the Physik Instrumente (PI-USA) N-565 linear positioner offers 0.5-nm system resolution. The aluminum positioner has 2-nm minimum incremental motion and ±5-nm unidirectional repeatability. Bidirectional repeatability is ±12 nm and velocity is 10 mm/s maximum. The N-565.260 version, by example, has a 26-mm travel range, a PIOne linear encoder, 10-N drive force, and measures 65 × 110 × 20 mm.

The PiezoWalkR technology combines the technological advantages of piezo actuators with those of piezomotors. The PiezoWalkR stepping drives yield subnanometer resolution, high drive forces, and high stiffness. They are not subject to sliding friction effects, in contrast to other piezomotorized drives. They are based on stiction contacts of several piezo actuators that step along a runner. For feed forward, the actuators are lifted physically from the runner, which causes hardly any wear and abrasion. Preloading the actuators against the runner ensures self-locking.

The PIOne optical encoder allows for a position resolution of much less than one nanometer and is based on an interferometric measuring principle. It measures the actual position — mechanical play or elastic deformation have no influence — and linearity error is less than 1%.

With crossed roller bearings, the point contact of the balls in ball bearings is replaced by a line contact of the hardened rollers. Consequently, they are considerably stiffer and need less preload, which reduces friction and allows for smoother running. A controller/driver module is available.