The H-850KMLD hexapod six-axis positioning system provides 1-µm minimum incremental motion over a 100-mm travel range in xy, and 0.5 µm over ±25 mm in the z direction. The unit features a 1,000-lb load capacity with repeatability in the three linear axes of ±1 µm, and ±5 µrad in the rotary axes.
Maximum velocity in xyz is 0.5 mm/s, and operating temperature is -10° to 50°C. All hexapods are easy to integrate and are delivered with a special C-887 multiaxis hexapod controller and an extensive software package.
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